Optical Mems Devices Based on Wet Anisotropic Etching of Silicon

Optical MEMS found various applications over the last years due to the rapidly increasing data rates in optical networks. As standard single-mode fibers are used, the required alignment tolerances are below 1 μm for optical fiber. The assembly and reliability of MOEMS devices requires increasing attention. Additionally, the trend is going from single-functionality devices to more complex subsystem units with a reduced number of fiber connections within the subsystem. Bulk silicon micromachining using wet anisotropic etching is a suitable tool to meet these requirements. It allows the fabrication of efficient and powerful actuators for switches, attenuators or filters as well as the realization of extremely precise alignment structures for optical components. Also the basic properties of crystalline silicon are given.